A novel design electroplating spring frame MEMS structure specimen is demonstrated here. The specimen can be fit into a specially designed microtensile apparatus which is capable of carrying out a series of tests on submicro scale freestanding thin films. Certain thin films applicable in MEMS were tested including sputtered Chrome, Nicole, Copper, Tantalum Nitride thin films. Metal specimens we...

Tantalum nitride nanoparticles (NPs) and cubic bixbyite-type Ta2N3 nanocrystals (NCs) were grown in (Ta-N+Al2O3)/Al2O3 periodic multilayers (MLs) after thermal treatment. The MLs were prepared by magnetron deposition at room temperature and characterized using grazing incidence small-angle X-ray scattering (GISAXS), X-ray reflectivity (XRR), grazing incidence X-ray diffraction (GIXRD), secondar...

CHARACTERIZATION AND CORROSION OF BCC-TANTALUM COATING DEPOSITED ON ALUMINUM AND STEEL SUBSTRATE BY DC MAGNETRON SPUTTERING by Chirag Joshi Tantalum is one of the most versatile highly refractory corrosion-resistant metals. Tantalum coating can be used as an effective corrosion barrier if it is continuous, free from defects and it adheres well to the substrate. A DC magnetron sputtering techniq...

Tantalum cobalt nitride photocatalysts were prepared using a simple drop coating method on a Ta foil substrate followed by thermal ammonia treatment, and their photoelectrochemical (PEC) properties for water oxidation under visible light were studied. The resulting Ta0.9Co0.1Nx films showed a photocurrent of ca. 1.5 mA/cm (12 times higher than that of Ta3N5) under 100 mW/cm visible light irradi...

In the last decades an important number of research papers published on nano chip electrode and cathode electrochromic materials. Tantalum (Ta) with so high melting point can be as a good candidate for the future of nano chip devices. However, its surface has not enough trap centers and/or occupation states, so nitrogen ions exposed on Ta surafce, may solve this problem. For this purpose, in th...

Tantalum (Ta) oxide, due to its high-temperature capabilities and thermal expansion coefficient similar to silicon nitride, is a promising candidate for environmental barriers for silicon (Si) nitride-based ceramics. This paper focuses on the development of plasma-sprayed Ta oxide as an environmental barrier coating for silicon nitride. Using a D-optimal design of experiments, plasma-spray proc...

Tantalum nitride (Ta2N) nanocrystals have been successfully synthesized at 650 °C through a chemical reaction in an autoclave. The X-ray powder diffraction pattern indicates that the product is hexagonal phase Ta2N. Transmission electron microscopy image shows obtained Ta2N consist of nanoparticles with average size about 50 nm. Furthermore, thermal gravimetric analyzer (TGA) result has good st...